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| LAM Research chamber parts |
| Silicon cathode (R4520)
Graphitile cathode (R4500)
Al+Anodz cathode (R4420/R4720)
839-011906-001 UP Electron 6" SILICON
713-011575-001
713-011577-001
857-020266-006 Kit, Upper Electrode/Baffles, 6"
713-028487-001 Ring Confinemnt (Vespel)
713-11221-1-A
714-011222-001
715-011622-001 Lift Wafer 4-Pin
715-028626-001 Plate, Upper Baffle, 6"
715-028627-001 Plate, Lower Baffle, 6"
716-011009-001 Quartz View Window
716-011533-001 Quartz EPD Window
716-011603-001
716-028028-004 Ring Elec. Clamp 12 bolt
716-028123-002
715-011746-161 WAFER CLAMP
715-011531-015 6" ELECTRODE ,ALUM., ANODIZED
715-018991-206 6" ELECTRODE ,ALUM., ANODIZED
715-011753-001 UPPER BAFFLE
715-011913-080 715-011913-005 LOWER BAFFLE
715-011749-006 Alum., Attach Ring
716-011543-001 Clamp , Attach., Clamp System
716-011570-001 RING,FILTER ORIFICE
716-028249-064 Ceramic FOCUS + EDGE RING
715-140286-001 FOCUS RING
715-030136-003 EDGE RING
734-006760-001 O-RING
715-011565-001 BOLT CLAMP RETAINNING
715-011665-006 ELECTRODE, Flat, Semi6" Clamp
718-092326-061 ELECTRODE, Flat, Semi6"ESC
716-011564-001 6" DFP-2 Upper electrode
715-011900-001 4500 UPPER BAFFLE
716-011922-001 CERAMIC / 4500
715-330166-003 COVER, ROD, CLPG, AL, B.A.C
715-330312-001 RING, RTNG, CLIP
716-330162-002 RING, FILLER, B.A.C
715-330161-002 SHLD, B.A.C., THK
796-009209-040 SCREW, SOCKET HEAD, 1/4-20*2.50",VENT
721-000964-001 WASHER, FLAT, 1/4",SST
716-330121-001 WDO,RF SHPD CER,FXD GAPN
734-0008835-001 O-RING, 10.171 ID * .139 C/S
716-021323-002 FUNNEL, QUARTZ, 6" STRIPPER
716-330167-161 RING, ACTUATOR, B.A.C
715-330152-002 HSG, SPRING.ADIJUSTABLE
715-330153-002 ROD,CLPG,ADJUSTABLE
720-093867-005 SCREW, SET, SELF-LOCKING. 10-32 * .312
754-093243-006 SPRING, COMPRESSION,WIRE 0.055*1.50
720-000940-008 SCREW,SOCKET HEAD CAP, 8-32*1/2
721-000946-002 WASHER,SPLIT-LOCK,#8,SST
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