Part Number Parts Description Machine Model
3D10-100280-11 12" Silicon Cathode(H836) 360mmOD X 10mmT, 0.5mm
3D10-302020-11 12" Silicon Cathode(H912) 376mmOD X 10mmT, 0.5mm
3D87-003411-12 CEL Body(OX) SE -
3D87-003411-13 Cel, OX T10-75-C912-Cel Body Assy -
3D87-002056-13 CEL Body(OX) SE -
3D87-052667-11 CEL Body(OX) SE -
3D10-250316-11 12" Silicon Electrode Inner(H1283) SHIN
3D10-202375-12 12" Silicon Electrode Outer 380mmOD X305mmID X14.2mmT
3D10-202372-11 12" Silicon Electrode Protection Ring 410mmOD X349mmID X10mmT
3D10-201089-13 12" Focus Ring 360mmOD X 3.4mmT
3D10-200499-11 12" Focus Ring 360mmOD X 6.5mmT
3D10-201348-11 12" Focus Ring 360mmOD X 6.5mmT
3D10-201448-11 12" Focus Ring 360mmOD X 3.4mmT
3D10-201448-12 Focus Ring 360-302-C TE
3D10-201448-21 Focus Ring 360-302-C 3.0T TE
3D10-202339-11 Focus Ring 360-302(L-Res) TE
3D10-202364-12 Inner Cel TE
3D10-202409-12 Focus Ring 360-301-L61
3D10-250197-11 Focus Ring L6-5.8-LT
3D10-250317-11 Cel Outer SH-OX RP470-0.2 SHIN
3D10-250318-11 Focus Ring 3.4T SHIN
3D10-250369-11 Focus Ring 360-302-T4-Taper TE
3D10-350067-11 Protection Ring TE RP470
2L10-250070-12 STD Focus Ring VESTA
2L10-2500771-31 CIP Focus Ring VESTA
3D10-201448-13 12" Focus Ring 360mmOD X 3.4mmT
3D10-200585-13 12" Ring shield Si 378mmOD X 23.2mmT
12" Shield Ring 380mmOD X 6.5mmT
3D87-003746-12 ESC Terius
3D87-00392?-17 ESC Terius
3D87-002056-12 ESC Terius
3D10-101056-V1 ESC Terius
